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Mechatronic design of a novel linear compliant positioning stage with large travel range and high out-of-plane

Hua LIU, Xin XIE, Ruoyu TAN, Lianchao ZHANG, Dapeng FAN

《机械工程前沿（英文）》 2017年第12卷第2期页码 265-278 doi: 10.1007/s11465-017-0453-y

摘要：

Most of the XY positioning stages proposed in previous studies are mainly designed by considering only a single performance indicator of the stage. As a result, the other performance indicators are relatively weak. In this study, a 2-degree-of-freedom linear compliant positioning stage (LCPS) is developed by mechatronic design to balance the interacting performance indicators and realize the desired positioning stage. The key parameters and the coupling of the structure and actuators are completely considered in the design. The LCPS consists of four voice coil motors (VCMs), which are conformally designed for compactness, and six spatial leaf spring parallelograms. These parallelograms are serially connected for a large travel range and a high out-of-plane payload capacity. The mechatronic model is established by matrix structural analysis for structural modeling and by Kirchhoff’s law for the VCMs. The sensitivities of the key parameters are analyzed, and the design parameters are subsequently determined. The analytical model of the stage is confirmed by experiments. The stage has a travel range of 4.4 mm× 7.0 mm and a 0.16% area ratio of workspace to the outer dimension of the stage. The values of these performance indicators are greater than those of any existing stage reported in the literature. The closed-loop bandwidth is 9.5 Hz in both working directions. The stage can track a circular trajectory with a radius of 1.5 mm, with 40 mm error and a resolution of lower than 3 mm. The results of payload tests indicate that the stage has at least 20 kg out-of-plane payload capacity.

关键词： mechatronic design linear compliant positioning stage large travel range high out-of-plane payload capacity spatial parallelogram voice coil motor sensitivity analysis

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Precision control system of two-DOF stage with linear ultrasonic motor

ZHANG Hanlei, SHI Yunlai, ZHAO Chunsheng

《机械工程前沿（英文）》 2008年第3卷第4期页码 421-425 doi: 10.1007/s11465-008-0063-9

摘要： Using an appropriate control method, linear ultrasonic motors can be used in applications requiring high position accuracy. In this paper, a closed loop PI control system is designed to achieve high position accuracy during the control of a two-DOF stage driven by linear ultrasonic motors. Two ultrasonic motors are mounted on the stage to generate motion in two orthogonal directions. The PI control algorithm is used to increase the stability and accuracy of position control. The -axis mover covers 30 mm forward and backward in less than 0.3 s settling time and the -axis mover in less than 0.4 s. Experimental results denote that the control strategy proposed in this paper appears to have high efficiency, quick response, and high accuracy.

关键词： settling position accuracy PI control control algorithm orthogonal

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Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning

Chengyuan LIANG, Fang YUAN, Xuedong CHEN, Wei JIANG, Lizhan ZENG, Xin LUO

《机械工程前沿（英文）》 2019年第14卷第3期页码 255-272 doi: 10.1007/s11465-019-0538-x

摘要： Nano-precision positioning stages are characterized by rigid-flexible coupling systems. The complex dynamic characteristics of mechanical structure of a stage, which are determined by structural and dynamic parameters, exert a serious influence on the accuracy of its motion and measurement. Systematic evaluation of such influence is essential for the design and improvement of stages. A systematic approach to modeling the dynamic accuracy of a nano-precision positioning stage is developed in this work by integrating a multi-rigid-body dynamic model of the mechanical system and measurement system models. The influence of structural and dynamic parameters, including aerostatic bearing configurations, motion plane errors, foundation vibrations, and positions of the acting points of driving forces, on dynamic accuracy is investigated by adopting the H-type configured stage as an example. The approach is programmed and integrated into a software framework that supports the dynamic design of nano-precision positioning stages. The software framework is then applied to the design of a nano-precision positioning stage used in a packaging lithography machine.

关键词： nano-precision positioning stage analysis and design structural and dynamic parameters dynamic accuracy systematic modeling

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Model reduction techniques for dynamics analysis of ultra-precision linear stage

Xuedong CHEN, Zhixin LI

《机械工程前沿（英文）》 2009年第4卷第1期页码 64-70 doi: 10.1007/s11465-009-0009-x

摘要： Spring-damping elements are used to simplify the internal interaction in the proposed finite element (FE) model of an ultra-precision linear stage. The dynamics behavior is studied. The comparison between mode shapes from the eigenvalue analysis shows that the components, except the translator, can represent system dynamics characteristics. A reduction approach is used to simplify the system in a dynamic studied. There is little difference between the vibration mode and the response analysis. The experimental modal analysis proves the validity of the reduction approach, which can be generalized to the development and dynamics characteristic study of a complex system model to obviously save computational resource.

关键词： dynamics analysis air-bearing linear stage reduction

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Mechanical and geometric advantages in compliant mechanism optimization

Michael Yu WANG

《机械工程前沿（英文）》 2009年第4卷第3期页码 229-241 doi: 10.1007/s11465-009-0066-1

摘要： This paper presents a focused examination of the mechanical and geometric advantages in compliant mechanisms and their ramifications in the design formulations of compliant mechanisms posed as a topology optimization problem. With a linear elastic structural analysis, we quantify mechanical (and geometric) advantage in terms of the stiffness elements of the mechanism's structure. We then analyze the common formulations of compliant mechanism optimization and the role of the external springs added in the formulations. It is shown that the common formulations using mechanical (or geometric) advantage would directly emulate at best a rigid-body linkage to the true optimum design. As a result, the topology optimization generates point flexures in the resulting optimal mechanisms. A case study is investigated to demonstrate the resulting trends in the current formulations.

关键词： compliant mechanisms topology optimization mechanical advantage pseudo rigid-body mechanisms

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Analysis of frequency characteristics of compliant mechanisms

WANG Wenjing, YU Yueqing

《机械工程前沿（英文）》 2007年第2卷第3期页码 267-271 doi: 10.1007/s11465-007-0046-2

摘要： Much work is needed for a further study on the dynamic analysis of compliant mechanisms to improve their performance and operational accuracy. This paper uses the finite element method to develop a dynamic equation of the compliant mechanism. Natural frequencies and modes are derived. Using the differentials of a stiffness matrix to design parameters, a method for calculating the sensitivity of natural frequency is presented. The numerical simulation results indicate that the design parameters have an impact on the frequency characteristics of the compliant mechanisms and the proposed method is more accurate and convenient for analyzing frequency characteristics.

关键词： compliant mechanisms convenient sensitivity work analysis

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Understanding coupled factors that affect the modelling accuracy of typical planar compliant mechanisms

Guangbo HAO,Haiyang LI,Suzen KEMALCAN,Guimin CHEN,Jingjun YU

《机械工程前沿（英文）》 2016年第11卷第2期页码 129-134 doi: 10.1007/s11465-016-0392-z

摘要：

In order to accurately model compliant mechanism utilizing plate flexures, qualitative planar stress (Young’s modulus) and planar strain (plate modulus) assumptions are not feasible. This paper investigates a quantitative equivalent modulus using nonlinear finite element analysis (FEA) to reflect coupled factors in affecting the modelling accuracy of two typical distributed-compliance mechanisms. It has been shown that all parameters have influences on the equivalent modulus with different degrees; that the presence of large load-stiffening effect makes the equivalent modulus significantly deviate from the planar assumptions in two ideal scenarios; and that a plate modulus assumption is more reasonable for a very large out-of-plane thickness if the beam length is large.

关键词： coupling factors modelling accuracy compliant mechanisms equivalent modulus

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A brief review on nonlinear modeling methods and applications of compliant mechanisms

Guangbo HAO,Jingjun YU,Haiyang LI

《机械工程前沿（英文）》 2016年第11卷第2期页码 119-128 doi: 10.1007/s11465-016-0387-9

摘要：

Compliant mechanisms (CMs) have become one of the most popular research themes in mechanisms and robotics because of their merits. This paper aims to provide a brief systematic review on the advances of nonlinear static modeling approaches and the applications of CMs to promote interdisciplinary/multidisciplinary development for associated theories and other new applications. It also predicts likely future directions of applications and theory development.

关键词： compliant mechanisms modelling nonlinearity applications review

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Preload characteristics identification of the piezoelectric-actuated 1-DOF compliant nanopositioning

Ruizhou WANG, Xianmin ZHANG

《机械工程前沿（英文）》 2015年第10卷第1期页码 20-36 doi: 10.1007/s11465-015-0328-z

摘要：

Packaged piezoelectric ceramic actuators (PPCAs) and compliant mechanisms are attractive for nanopositioning and nanomanipulation due to their ultra-high precision. The way to create and keep a proper and steady connection between both ends of the PPCA and the compliant mechanism is an essential step to achieve such a high accuracy. The connection status affects the initial position of the terminal moving plate, the positioning accuracy and the dynamic performance of the nanopositioning platform, especially during a long-time or high-frequency positioning procedure. This paper presents a novel external preload mechanism and tests it in a 1-degree of freedom (1-DOF) compliant nanopositioning platform. The 1-DOF platform utilizes a parallelogram guiding mechanism and a parallelogram load mechanism to provide a more accurate actual input displacement and output displacement. The simulation results verify the proposed stiffness model and dynamic model of the platform. The values of the preload displacement, actual input displacement and output displacement can be measured by three capacitive sensors during the whole positioning procedure. The test results show the preload characteristics vary with different types or control modes of the PPCA. Some fitting formulas are derived to describe the preload displacement, actual input displacement and output displacement using the nominal elongation signal of the PPCA. With the identification of the preload characteristics, the actual and comprehensive output characteristics of the PPCA can be obtained by the strain gauge sensor (SGS) embedded in the PPCA.

关键词： nanopositioning preload characteristic packaged piezoelectric ceramic actuator compliant mechanism

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Conceptual design of compliant translational joints for high-precision applications

Guangbo HAO,Haiyang LI,Xiuyun HE,Xianwen KONG

《机械工程前沿（英文）》 2014年第9卷第4期页码 331-343 doi: 10.1007/s11465-014-0321-y

摘要：

Compliant translational joints (CTJs) have been extensively used in precision engineering and microelectromechanical systems (MEMS). There is an increasing need for designing higher-performance CTJs. This paper deals with the conceptual design of CTJs via three approaches: parallelogram based method, straight-line motion mechanism based method and combination based method. Typical emerging CTJ designs are reviewed by explaining their design principles and qualitatively analyzing their characteristics. New CTJs are proposed using three approaches, including an asymmetric double parallelogram mechanism with slaving mechanism, several compact and symmetric double parallelogram mechanisms with slaving mechanisms and a general CTJ using the center drift compensation and a CTJ using Roberts linkage and several combination designs. This paper provides an overview of the current advances/progresses of CTJ designs and lays the foundation for further optimization, quantitative analysis and characteristic comparisons.

关键词： compliant mechanisms translational joints conceptual design parallelogram straight-line motion combination method

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Robust topology optimization of hinge-free compliant mechanisms with material uncertainties based on

Junjie ZHAN, Yangjun LUO

《机械工程前沿（英文）》 2019年第14卷第2期页码 201-212 doi: 10.1007/s11465-019-0529-y

摘要： This paper presents a new robust topology optimization framework for hinge-free compliant mechanisms with spatially varying material uncertainties, which are described using a non-probabilistic bounded field model. Bounded field uncertainties are efficiently represented by a reduced set of uncertain-but-bounded coefficients on the basis of the series expansion method. Robust topology optimization of compliant mechanisms is then defined to minimize the variation in output displacement under constraints of the mean displacement and predefined material volume. The nest optimization problem is solved using a gradient-based optimization algorithm. Numerical examples are presented to illustrate the effectiveness of the proposed method for circumventing hinges in topology optimization of compliant mechanisms.

关键词： compliant mechanisms robust topology optimization hinges uncertainty bounded field

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Modeling of large-deflection links for compliant mechanisms

Zhonglei FENG, Yueqing YU, Wenjing WANG,

《机械工程前沿（英文）》 2010年第5卷第3期页码 294-301 doi: 10.1007/s11465-010-0019-8

摘要： The traditional pseudo-rigid-body model (PRBM) has one degree of freedom (DOF) and performs a good simulation to the tip locus of flexible links for compliant mechanisms on the basis of a parametric approximation method. In this study, a new approach of a two-DOF PRBM is proposed to simulate both the tip locus and tip deflection angle of large-deflection links for compliant mechanisms on the basis of the angular deflection approximation technique. A linear regression for the spring stiffness coefficient of the 2R PRBM using the optimization technique is presented. The advantage of the new model is well illustrated through a numerical comparison between the 1R and the 2R PRBM.

关键词： compliant mechanism pseudo-rigid-body model (PRBM) large-deflection link angular deflection approximation

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Conceptual design of compliant mechanisms using level set method

Shi-kui CHEN, Michael Yu WANG

《机械工程前沿（英文）》 2006年第1卷第2期页码 131-145 doi: 10.1007/s11465-006-0018-y

摘要： We propose a level set method-based framework for the conceptual design of compliant mechanisms. In this method, the compliant mechanism design problem is recast as an infinite dimensional optimization problem, where the design variable is the geometric shape of the compliant mechanism and the goal is to find a suitable shape in the admissible design space so that the objective functional can reach a minimum. The geometric shape of the compliant mechanism is represented as the zero level set of a one-higher dimensional level set function, and the dynamic variations of the shape are governed by the Hamilton-Jacobi partial differential equation. The application of level set methods endows the optimization process with the particular quality that topological changes of the boundary, such as merging or splitting, can be handled in a natural fashion. By making a connection between the velocity field in the Hamilton-Jacobi partial differential equation with the shape gradient of the objective functional, we go further to transform the optimization problem into that of finding a steady-state solution of the partial differential equation. Besides the above-mentioned methodological issues, some numerical examples together with prototypes are presented to validate the performance of the method.

关键词： splitting minimum dimensional optimization Hamilton-Jacobi topological

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Untethered quadrupedal hopping and bounding on a trampoline

Boxing WANG, Chunlin ZHOU, Ziheng DUAN, Qichao ZHU, Jun WU, Rong XIONG

《机械工程前沿（英文）》 2020年第15卷第2期页码 181-192 doi: 10.1007/s11465-019-0559-5

摘要： For quadruped robots with springy legs, a successful jump usually requires both suitable elastic parts and well-designed control algorithms. However, these two problems are mutually restricted and hard to solve at the same time. In this study, we attempt to solve the problem of controller design with the help of a robot without any elastic mounted parts, in which the untethered robot is made to jump on a trampoline. The differences between jumping on hard surfaces with springy legs and jumping on springy surfaces with rigid legs are briefly discussed. An intuitive control law is proposed to balance foot contact forces; in this manner, excessive pitch oscillation during hopping or bounding can be avoided. Hopping height is controlled by tuning the time delay of the leg stretch. Together with other motion generators based on kinematic law, the robot can perform translational and rotational movements while hopping or bounding on the trampoline. Experiments are conducted to validate the effectiveness of the proposed control framework.

关键词： hopping and bounding gait compliant mechanism compliant contact balance control strategy legged locomotion control quadruped robot

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三塔悬索桥中间塔施工关键技术

田唯,刘建波,游新鹏

《中国工程科学》 2012年第14卷第5期页码 23-28

摘要：

泰州大桥中间塔采用深水沉井基础与纵向“人”字形钢塔相组合的结构形式，其施工极为复杂。该项目通过前期研究成果，在深水沉井基础施工过程中利用上下游锚墩定位技术，结合信息化实时监控系统，确保了沉井的准确定位和精确着床，同时采用终沉控制措施成功防止了沉井在终沉阶段的突沉、超沉现象。钢塔架设精度高，调整节段少，且在安装过程中结构存在多次体系转换，针对以上特点，采用几何控制的全过程控制理念，将节段制造误差、预拼装线性和架设误差进行统一分析，建立精度管理系统，最终钢塔的架设精度远远优于设计精度。泰州大桥中间塔施工取得了

关键词：泰州大桥锚墩定位实时监控终沉控制全过程控制架设精度